[Code of Federal Regulations]

[Title 40, Volume 13]

[Revised as of July 1, 2005]

From the U.S. Government Printing Office via GPO Access

[CITE: 40CFR63.7180]



[Page 62]

 

                   TITLE 40--PROTECTION OF ENVIRONMENT

 

         CHAPTER I--ENVIRONMENTAL PROTECTION AGENCY (CONTINUED)

 

PART 63_NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR 

SOURCE CATEGORIES--Table of Contents

 

 Subpart BBBBB_National Emission Standards for Hazardous Air Pollutants 

                     for Semiconductor Manufacturing

 

Sec. 63.7180  What is the purpose of this subpart?



    Source: 68 FR 27925, May 22, 2003, unless otherwise noted.



                        What This Subpart Covers





    This subpart establishes national emission standards for hazardous 

air pollutants (NESHAP) for semiconductor manufacturing facilities. This 

subpart also establishes requirements to demonstrate initial and 

continuous compliance with the emission standards.