[Code of Federal Regulations]

[Title 40, Volume 13]

[Revised as of July 1, 2005]

From the U.S. Government Printing Office via GPO Access

[CITE: 40CFR63.7181]



[Page 62]

 

                   TITLE 40--PROTECTION OF ENVIRONMENT

 

         CHAPTER I--ENVIRONMENTAL PROTECTION AGENCY (CONTINUED)

 

PART 63_NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR 

SOURCE CATEGORIES--Table of Contents

 

 Subpart BBBBB_National Emission Standards for Hazardous Air Pollutants 

                     for Semiconductor Manufacturing

 

Sec. 63.7181  Am I subject to this subpart?



    (a) You are subject to this subpart if you own or operate a 

semiconductor manufacturing process unit that is a major source of 

hazardous air pollutants (HAP) emissions or that is located at, or is 

part of, a major source of HAP emissions.

    (b) A major source of HAP emissions is any stationary source or 

group of stationary sources located within a contiguous area and under 

common control that emits or has the potential to emit, considering 

controls, in the aggregate, any single HAP at a rate of 10 tons per year 

(tpy) or more or any combination of HAP at a rate of 25 tpy or more.