[Code of Federal Regulations]

[Title 40, Volume 13]

[Revised as of July 1, 2005]

From the U.S. Government Printing Office via GPO Access

[CITE: 40CFR63.7184]



[Page 63-64]

 

                   TITLE 40--PROTECTION OF ENVIRONMENT

 

         CHAPTER I--ENVIRONMENTAL PROTECTION AGENCY (CONTINUED)

 

PART 63_NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR 

SOURCE CATEGORIES--Table of Contents

 

 Subpart BBBBB_National Emission Standards for Hazardous Air Pollutants 

                     for Semiconductor Manufacturing

 

Sec. 63.7184  What emission limitations, operating limits, and work 

practice standards must I meet?



    (a) If you have a new, reconstructed, or existing affected source, 

as defined in Sec. 63.7182(b), you must comply with all applicable 

emission limitations in this section on and after the compliance dates 

specified in Sec. 63.7183.

    (b) Process vents--organic HAP emissions. For each process vent that 

emits organic HAP, other than process vents from storage tanks, you must 

limit organic HAP emissions to the level specified in paragraph (b)(1) 

or (2) of this section. These limitations can be met by venting 

emissions from your process vent through a closed vent system to any 

combination of control devices meeting the requirements of Sec. 

63.982(a)(2).

    (1) Reduce the emissions of organic HAP from the process vent stream 

by 98 percent by weight.

    (2) Reduce or maintain the concentration of emitted organic HAP from 

the process vent to less than or equal to 20 parts per million by volume 

(ppmv).

    (c) Process vents--inorganic HAP emissions. For each process vent 

that emits inorganic HAP, other than process vents from storage tanks, 

you must limit inorganic HAP emissions to the level specified in 

paragraph (c)(1) or (2) of this section. These limitations can be met by 

venting emissions from your process vent through a closed vent system to 

a halogen scrubber meeting the requirements of Sec. Sec. 63.983 (closed 

vent



[[Page 64]]



system requirements) and 63.994 (halogen scrubber requirements); the 

applicable general monitoring requirements of Sec. 63.996; the 

applicable performance test requirements; and the monitoring, 

recordkeeping and reporting requirements referenced therein.

    (1) Reduce the emissions of inorganic HAP from the process vent 

stream by 95 percent by weight.

    (2) Reduce or maintain the concentration of emitted inorganic HAP 

from the process vent to less than or equal to 0.42 ppmv.

    (d) Storage tanks. For each storage tank, 1,500 gallons or larger, 

you must limit total HAP emissions to the level specified in paragraph 

(d)(1) or (2) of this section if the emissions from the storage tank 

vent contains greater than 0.42 ppmv inorganic HAP. These limitations 

can be met by venting emissions from your storage tank through a closed 

vent system to a halogen scrubber meeting the requirements of Sec. Sec. 

63.983 (closed vent system requirements) and 63.994 (halogen scrubber 

requirements); the applicable general monitoring requirements of Sec. 

63.996; the applicable performance test requirements; and the 

monitoring, recordkeeping and reporting requirements referenced therein.

    (1) Reduce the emissions of inorganic HAP from each storage tank by 

95 percent by weight.

    (2) Reduce or maintain the concentration of emitted inorganic HAP 

from the process vent to less than or equal to 0.42 ppmv.

    (e) You must comply with the applicable work practice standards and 

operating limits contained in Sec. 63.982(a)(1) and (2). The closed 

vent system inspection requirements of Sec. 63.983(c), as referenced by 

Sec. 63.982(a)(1) and (2), do not apply.



                         Compliance Requirements