[Code of Federal Regulations]

[Title 40, Volume 13]

[Revised as of July 1, 2005]

From the U.S. Government Printing Office via GPO Access

[CITE: 40CFR63.7188]



[Page 66]

 

                   TITLE 40--PROTECTION OF ENVIRONMENT

 

         CHAPTER I--ENVIRONMENTAL PROTECTION AGENCY (CONTINUED)

 

PART 63_NATIONAL EMISSION STANDARDS FOR HAZARDOUS AIR POLLUTANTS FOR 

SOURCE CATEGORIES--Table of Contents

 

 Subpart BBBBB_National Emission Standards for Hazardous Air Pollutants 

                     for Semiconductor Manufacturing

 

Sec. 63.7188  What are my monitoring installation, operation, and 

maintenance requirements?



    If you comply with the emission limitations of Sec. 63.7184 by 

venting the emissions of your semiconductor process vent through a 

closed vent system to a control device, you must comply with the 

requirements of paragraphs (a) and (b) of this section.

    (a) You must meet the applicable general monitoring, installation, 

operation, and maintenance requirements specified in Sec. 63.996.

    (b) You must meet the monitoring, installation, operation, and 

maintenance requirements specified for closed vent systems and 

applicable control devices in Sec. Sec. 63.983 through 63.995. If you 

used the design evaluation procedure in Sec. 63.7187(i) to demonstrate 

compliance, you must use the information from the design evaluation to 

establish the operating parameter level for monitoring of the control 

device.



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